.
pin - -, -. 㳿 pin - , . -, -. 㳿 pin - -, .
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pn - -, -. pn - , . -, -. pn - -, .
Annotation.
The researches of pn - photo diodes on the basis of high-resistance silicon and -, X-ray detectors with scintillator-photo diode are carried out. The results of development of a design and technology of manufacturing silicon pn - photo diodes for scintielectronic detectors are submitted, their electrophysical and optical parameters are considered. The spectrometric characteristics of the -, X-ray detectors scintillator-photo diode are given. The methods of the control of technology manufacturing of silicon pn - photo diodes and estimation of their quality with the help of the electrophysical and optical characteristics and spectra of direct registration low energy -, X-ray radiation are developed.
pn -, - . -, -. pn , pn . [1-7]. - - , , .
, ' [1], [7], , 㳿 - . 㳿 pn [1], [7].
( 0,1-0,2 2 1-5 2), ( 50 /2) [1] (1-5 /2) 50-70 .
, , - . 㳿 㳿 () [7], .
- - - [1],[2],[4],[7] (, , ) [1], [3], [5], [7], , ) [1], [7], ﳿ [1],[9], ( , - , - ) [7], 㳿 ( ) [1], ( , , - ) [7], , ( , ) [1], ( , ) [1], [7], [9], ( , ).
1. Գ- pn -, - pn ( - ).
㳿 pn - pn . pn p+-, n-, p+-. - ' p+-, p+-n [8] p+- 糿 [8]. pn - pn , .1. pin , pin . .1. pn (dSiO2 = xxx-xxx ) . () xxx , .
pin - - (-) (. 2) . '. , ' .
- .2. - - (). (, ) (, ). ' , ' . - CsJ(Tl), ZnSe(Te), CdWO4, NaJ(Tl) [1]. -. 㳿 -, , - . .
. 1. pn - pn , SiO2 pn , (AR)
. 2. - ( - ).
1 - g- ;
2 - ;
3 - ( );
4 - ;
5 - - ;
6 - pin ;
7 - ;
8 - ' - ;
9 - .
' , ' . ϳ ' - () .
, . " - (') - - " . SiO2 Si3N4 - CsJ(Tl), NaJ(Tl), ZnSe, LSO [10]. -. , - (SiO2 + Si3N4) [10], 㳿 . .
1. - pin - -, - (-).
2. pin - pn , pn (SiO2) ().
3. , pin- 2-3 A/2, (6-8%) -.
4. pin - , 100 , , .
5. pin - , 㳿 .
6. pin- , -, -. .
7. pin - -, -, , pin- -, -.
8. pin - -, pin .
9. n 㳿 .
10. 㳿 - -, . -, - .
˳
1 .., .., .., .., .., .. . .., .: , 1998. - 311.
2 Gunji S., Hanada N., Hashino T. Use of a large area photodiode in CsI (Tl) scintillation counters // Nucl. Instr. and Meth. Phys. Res. 1990, A 295, P. 400-404.
3 Moszynsk M., Wolski D., Ludziejewski T. Particle identification by digital charge comparison method applied to CsI (Tl) crystal coupled to photodiode // Nucl. Instr. and Meth. Phys. Res. 1993, A 336, P. 587-590.
4 . ., . ., . ., . . - // . 1991, 4, . 65-69.
5 Rosenfeld A., Perevertaylo V.L., Lerch M, et al. Spectral characterisation of a blue-enhanced silicon photodetector // IEEE Trans. of Nuclear Science. v.48(2001), N 4, .1220-1224.
6 Rosenfeld A., Lerch M., Takacs G., Gektin A., Perevertailo V. Single detector-dual scintillator anti-Compton probes // Functional Materials, 11(2004), N1, p.1-5.
7. .. - - // - " ", , 2004, .200.
8. .. . - :, , 1986, .1. - 404.
9. .., ., .., .. // . 2005, 6, .33-38.
10. .., .., .., .. // - " ", , 2005, .282.
11. http://w.w.w.hamamatsu.com/ Si PIN Photodiode // "Hamamatsu Photonics".
12. .., .., .., .., ... pin // 2- ̳ - " 㳿", , 2006, .104.
13. http://w.w.w.deetee.com/ Scintillation Detector Applications using Si Diodes // "Detection Technology Inc.".